发明授权
- 专利标题: Method and apparatus for separating a thin film from a substrate
- 专利标题(中): 从基板上分离薄膜的方法和装置
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申请号: US344841申请日: 1994-11-23
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公开(公告)号: US5696327A公开(公告)日: 1997-12-09
- 发明人: He Huang , Maarten P. de Boer , John C. Nelson , Feng Wang , William W. Gerberich
- 申请人: He Huang , Maarten P. de Boer , John C. Nelson , Feng Wang , William W. Gerberich
- 申请人地址: MN Minneapolis
- 专利权人: Regents of the University of Minnesota
- 当前专利权人: Regents of the University of Minnesota
- 当前专利权人地址: MN Minneapolis
- 主分类号: G01N19/04
- IPC分类号: G01N19/04 ; G01N3/24
摘要:
An apparatus and method for separating a thin film from a substrate, the thin film having a surface with a selected width, includes an indenter for applying a force to the surface of the thin film that is substantially equal along the selected width. The forces are applied until separation of a portion of the thin film from the substrate occurs. In a preferred embodiment, the indenter is made from a block of material having a substantially flat surface engageable with the surface of the thin film. The substantially flat surface of the block of material has a width at least equal to the width of the surface of the thin film. Based on the two dimensional geometry of the mechanics, accurate analysis of work of adhesion is achieved.
公开/授权文献
- USD276047S Mowing machine 公开/授权日:1984-10-23
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