Method and apparatus for separating a thin film from a substrate
    1.
    发明授权
    Method and apparatus for separating a thin film from a substrate 失效
    从基板上分离薄膜的方法和装置

    公开(公告)号:US5696327A

    公开(公告)日:1997-12-09

    申请号:US344841

    申请日:1994-11-23

    IPC分类号: G01N19/04 G01N3/24

    CPC分类号: G01N19/04 Y10T156/1983

    摘要: An apparatus and method for separating a thin film from a substrate, the thin film having a surface with a selected width, includes an indenter for applying a force to the surface of the thin film that is substantially equal along the selected width. The forces are applied until separation of a portion of the thin film from the substrate occurs. In a preferred embodiment, the indenter is made from a block of material having a substantially flat surface engageable with the surface of the thin film. The substantially flat surface of the block of material has a width at least equal to the width of the surface of the thin film. Based on the two dimensional geometry of the mechanics, accurate analysis of work of adhesion is achieved.

    摘要翻译: 一种用于从基片上分离薄膜的装置和方法,所述薄膜具有选定宽度的表面,包括用于向所述薄膜表面施加力的压头,所述压力沿所选择的宽度基本相等。 施加力,直到发生部分薄膜与基板分离。 在优选实施例中,压头由具有与薄膜表面接合的基本平坦的表面的材料块制成。 材料块的基本上平坦的表面的宽度至少等于薄膜表面的宽度。 基于力学的二维几何形状,实现了粘附工作的准确分析。