发明授权
- 专利标题: Method and apparatus for optical inspection
- 专利标题(中): 光学检测方法和装置
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申请号: US550682申请日: 1995-10-31
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公开(公告)号: US5699153A公开(公告)日: 1997-12-16
- 发明人: Kenji Takamoto , Kanji Nishii , Masami Ito , Atsushi Fukui
- 申请人: Kenji Takamoto , Kanji Nishii , Masami Ito , Atsushi Fukui
- 申请人地址: JPX Osaka-fu
- 专利权人: Matsushita Electric Industrial Co., Ltd.
- 当前专利权人: Matsushita Electric Industrial Co., Ltd.
- 当前专利权人地址: JPX Osaka-fu
- 优先权: JPX6-267168 19941031
- 主分类号: G01B11/00
- IPC分类号: G01B11/00 ; G01N21/88 ; G01N21/896 ; G01N21/952 ; G01N21/958
摘要:
The present invention provides an inspecting method and an apparatus therefor. A light illuminates an object to be inspected having optical diffusive characteristics such as a ceramics plate. A part of the light diffuses in the object from an illumination area is reflected at or passes through a defect such as a crack and reaches an imaging area. An image sensor detects the image of the imaging area. A signal showing a larger change is processed thereby to inspect the defect. The object is displaced stepwise relative to the light source and the image sensor. Thus, a crack or the like in an object can be inspected with high accuracy and at a high speed.
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