发明授权
US5700581A Solvent-free epoxy based adhesives for semiconductor chip attachment and
process
失效
无溶剂环氧基粘合剂用于半导体芯片的附着和工艺
- 专利标题: Solvent-free epoxy based adhesives for semiconductor chip attachment and process
- 专利标题(中): 无溶剂环氧基粘合剂用于半导体芯片的附着和工艺
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申请号: US670463申请日: 1996-06-26
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公开(公告)号: US5700581A公开(公告)日: 1997-12-23
- 发明人: Krishna G. Sachdev , Michael Berger , Mark S. Chace
- 申请人: Krishna G. Sachdev , Michael Berger , Mark S. Chace
- 申请人地址: NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: NY Armonk
- 主分类号: C08G59/30
- IPC分类号: C08G59/30 ; C08G59/62 ; C09J163/00 ; H01L21/52 ; H01L21/58 ; B32B9/04
摘要:
The present invention discloses chip (die) bond adhesive formulations preferably comprising a siloxane containing epoxide preferably a diglycidyl ether derivative, an anhydride curing additive which is soluble in the epoxide without the use of a solvent, and, optionally comprising, and oligomeric/polymeric co-additive of the type poly(alkylacrylate or -methacrylate), in conjunction with thermal and electrically conductive fillers and conventional co-catalysts used for curing epoxy systems to provide reworkable epoxy adhesives. Also disclosed are adhesive formulations comprising a siloxane containing epoxide and a hydroxybenzophenone curing additive which is soluble in the epoxide without the use of a solvent. The chips can be bonded to the substrate by conventional heating and curing techniques. With epoxy adhesive compositions comprising polyacrylate additives, the die bonded assembly can be reworked by heating the assembly to about 180.degree. C. to 250.degree. C. removing the chip, and rebonding a new chip on the same surface without any effect on the shear strength for die bonded on to gold, copper, silver or a ceramic die pad. Die shear strength using the adhesives remains unchanged when exposed to thermal shock involving -65.degree. C. to +150.degree. C. excursions, and HAST test at 130.degree. C. /85 percent RH (Relative Humidity) or 85.degree. C./85% RH. A method is also provided for using the adhesives to make electronic component assemblies.
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