发明授权
- 专利标题: Method for forming trench transistor structure
- 专利标题(中): 形成沟槽晶体管结构的方法
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申请号: US535397申请日: 1995-09-28
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公开(公告)号: US5705409A公开(公告)日: 1998-01-06
- 发明人: Keith E. Witek
- 申请人: Keith E. Witek
- 申请人地址: IL Schaumburg
- 专利权人: Motorola Inc.
- 当前专利权人: Motorola Inc.
- 当前专利权人地址: IL Schaumburg
- 主分类号: H01L21/336
- IPC分类号: H01L21/336 ; H01L27/11 ; H01L29/423 ; H01L29/78 ; H01L21/265
摘要:
A method for forming a trench transistor structure begins by forming a buried layers (12 and 16) and a doped well (22) in a substrate (10) via epitaxial growth processing. A trench region (24) is then etched into the substrate (10) to expose a the layer (12). A conductive sidewall spacer (28) is formed within the trench (24) as a gate electrode. The spacer (28) gates a first transistor (12, 28, 32) located adjacent a first half of the trench (24) and a second transistor (12, 28, 34) located adjacent a second half of the trench (24). Region (12) is a common electrode wherein the channel regions of both the first and second transistor are coupled in a serial manner through the region (12).
公开/授权文献
- US4999755A Tube light 公开/授权日:1991-03-12
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