发明授权
- 专利标题: Ferroelectric thin film and method of manufacturing the same
- 专利标题(中): 铁电薄膜及其制造方法
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申请号: US351216申请日: 1994-11-30
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公开(公告)号: US5717157A公开(公告)日: 1998-02-10
- 发明人: Atsushi Tomozawa , Satoru Fujii , Eiji Fujii , Ryoichi Takayama , Masafumi Kobune , Satoshi Fujii
- 申请人: Atsushi Tomozawa , Satoru Fujii , Eiji Fujii , Ryoichi Takayama , Masafumi Kobune , Satoshi Fujii
- 申请人地址: JPX Osaka
- 专利权人: Matsushita Electric Industrial Co., Ltd.
- 当前专利权人: Matsushita Electric Industrial Co., Ltd.
- 当前专利权人地址: JPX Osaka
- 优先权: JPX5-301411 19931201
- 主分类号: C04B35/472
- IPC分类号: C04B35/472 ; C23C14/08 ; C23C14/34 ; C30B23/02 ; H01L37/02 ; H01L41/316 ; H01L35/22 ; C04B35/491
摘要:
A ferroelectric thin film includes lead titanate including La and at least an element which forms a six-coordinate bond with oxygen atoms and which is selected from the group consisting of Mg and Mn. The ferroelectric thin film is imparted with a high c-axis orientation while the film is formed without a polarization process. The ferroelectric thin film is manufactured by the steps of: positioning a MgO single crystal substrate disposed in advance with a foundation platinum electrode by a sputtering method on the surface of a substrate heater, exhausting a chamber, heating the substrate by a substrate heater, letting in sputtering gases Ar and O.sub.2 through a nozzle into the chamber, and maintaining a high degree of vacuum. Then, high frequency electric power is input to a target from a high frequency electric power source to generate plasma, and a film is formed on the substrate. In this way, a ferroelectric thin film containing, for example, �(1-x).multidot.Pb.sub.1-y La.sub.y Ti.sub.1-y/4 O.sub.3 +x.multidot.MgO!, where x=0.01.about.0.10 and y=0.05.about.0.25 can be manufactured.
公开/授权文献
- US6142710A Apparatus and method for raising a foundation 公开/授权日:2000-11-07
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