发明授权
- 专利标题： Illumination optical apparatus and method and exposure apparatus using the illumination optical apparatus and method
- 专利标题（中）： 照明光学装置及使用该照明光学装置及方法的曝光装置
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申请号： US364575申请日： 1994-12-27
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公开(公告)号： US5717483A公开(公告)日： 1998-02-10
- 发明人: Tetsuo Kikuchi
- 申请人： Tetsuo Kikuchi
- 申请人地址： JPX
- 专利权人： Nikon Corporation
- 当前专利权人： Nikon Corporation
- 当前专利权人地址： JPX
- 优先权： JPX5-331190 19931227
- 主分类号： G03B27/54
- IPC分类号： G03B27/54 ; G03F7/20 ; H01L21/027 ; G03B27/72
摘要：
An illumination optical apparatus for setting the illuminance on an illuminated object as high as possible at or below the upper limit of illuminance. When the illumination state changing unit changes the illumination state of illumination light, for example, when the numerical aperture is decreased to lower the illuminance on the illuminated object, the power supplied to the light source is increased; inversely, when the numerical aperture is increased to enhance the illuminance on the illuminated object, the power supplied to the light source is decreased so that the illuminance is kept at or below the predetermined upper limit. This can maintain the illuminance on the illuminated object high and nearly constant even with a change of the illumination state.
公开/授权文献
- US4439577A Modified polyurethane liquid polymer compositions 公开/授权日：1984-03-27
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