发明授权
- 专利标题: Diamond-like carbon encapsulation of magnetic heads
- 专利标题(中): 钻石状碳封装磁头
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申请号: US722910申请日: 1996-09-27
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公开(公告)号: US5718949A公开(公告)日: 1998-02-17
- 发明人: Allan E. Schultz , L. Vincent Ruscello , William H. Nunne
- 申请人: Allan E. Schultz , L. Vincent Ruscello , William H. Nunne
- 申请人地址: CA Scotts Valley
- 专利权人: Seagate Technology, Inc.
- 当前专利权人: Seagate Technology, Inc.
- 当前专利权人地址: CA Scotts Valley
- 主分类号: G11B5/31
- IPC分类号: G11B5/31 ; C23C16/26 ; G11B5/127
摘要:
A thin film magnetic transducer supported on a substrate includes a coil that terminates at pads supported on the substrate. A layer of diamond-like carbon material encapsulates the head, substrate and coil, but not the pads. A thin layer of diamond-like carbon is deposited over the exposed portions of the transducer, coil and substrate. Three techniques are described for exposing the pads including employing a photoresist mask, depositing an adhesive layer of silicon over the conductive paths but not the pads, and using a photoresist mask to etch the diamond-like carbon layer over the pads and breaking down the silicon adhesive layer with a design voltage.
公开/授权文献
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