发明授权
US5723788A Angular velocity sensor having a balanced tuning fork structure 失效
角速度传感器具有平衡音叉结构

Angular velocity sensor having a balanced tuning fork structure
摘要:
A high-performance angular velocity sensor has a tuning-fork structure in which two vibrator units consisting of piezoelectric elements are coupled to each other. The angular velocity sensor comprises two metal plates, a first vibrator including a first actuator and a first detector joined orthogonally to each other, and a second vibrator including a second actuator and a second detector joined orthogonally to each other, the two vibrators being coupled by an electrode block to each other in parallel along an axis of detection. The first actuator and the first detector include piezoelectric elements bonded to the first metal surface, and the second actuator and the second detector include piezoelectric elements bonded to the second metal surface.
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