发明授权
- 专利标题: Angular velocity sensor having a balanced tuning fork structure
- 专利标题(中): 角速度传感器具有平衡音叉结构
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申请号: US760346申请日: 1996-12-04
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公开(公告)号: US5723788A公开(公告)日: 1998-03-03
- 发明人: Jiro Terada , Hiroshi Takenaka , Masaharu Ushihara , Masami Tamura , Hitoshi Nishimura , Kikuo Kaino
- 申请人: Jiro Terada , Hiroshi Takenaka , Masaharu Ushihara , Masami Tamura , Hitoshi Nishimura , Kikuo Kaino
- 申请人地址: JPX Osaka
- 专利权人: Matsushita Electric Industrial Co., Ltd.
- 当前专利权人: Matsushita Electric Industrial Co., Ltd.
- 当前专利权人地址: JPX Osaka
- 优先权: JPX5-16054 19930203; JPX5-16122 19930203
- 主分类号: G01C19/56
- IPC分类号: G01C19/56 ; G01P9/04
摘要:
A high-performance angular velocity sensor has a tuning-fork structure in which two vibrator units consisting of piezoelectric elements are coupled to each other. The angular velocity sensor comprises two metal plates, a first vibrator including a first actuator and a first detector joined orthogonally to each other, and a second vibrator including a second actuator and a second detector joined orthogonally to each other, the two vibrators being coupled by an electrode block to each other in parallel along an axis of detection. The first actuator and the first detector include piezoelectric elements bonded to the first metal surface, and the second actuator and the second detector include piezoelectric elements bonded to the second metal surface.
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