发明授权
- 专利标题： Bulk micromachined inductive transducers on silicon
- 专利标题（中）： 硅上的大量微机电感应传感器
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申请号： US457468申请日： 1995-06-01
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公开(公告)号： US5724015A公开(公告)日： 1998-03-03
- 发明人: Yu-Chong Tai , Denny K. Miu , Weilong Tang , Viktoria Temesvary , Shuyun Wu
- 申请人： Yu-Chong Tai , Denny K. Miu , Weilong Tang , Viktoria Temesvary , Shuyun Wu
- 申请人地址： CA Pasadena
- 专利权人： California Institute of Technology
- 当前专利权人： California Institute of Technology
- 当前专利权人地址： CA Pasadena
- 主分类号： H01F7/08
- IPC分类号： H01F7/08 ; H01H50/00 ; H01H51/22
摘要：
A bulk micromachined inductive transducer on single crystal silicon. The bulk micromachined micro-device has movable parts integrated with electromagnetically-driven microactuators for moving the parts. The integrated electromagnetic microactuators of the present micromachine move the movable parts in in-plane and/or out-of-plane sub-millimeter level motions in either translational or rotational directions.
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