公开(公告)号：US06526823B2

公开(公告)日：2003-03-04

申请号：US09727017

申请日：2000-11-29

Applicant: Yu-Chong Tai ,  Qiao Lin ,  Shuyun Wu

Inventor： Yu-Chong Tai ,  Qiao Lin ,  Shuyun Wu

IPC: G01F168

CPC classification number: G01F1/6845

Abstract: A sensor assembly has a substrate with a microchannel formed therein through which a fluid can flow. At least one sensor is proximate to the microchannel. The temperature of the at least one sensor or fluid may indicate the condition of the fluid, for example, the flow rate and the presence of gas bubbles and particulate substances.

Abstract translation: 传感器组件具有其中形成有微通道的基底，流体可以通过该通道流动。 至少一个传感器靠近微通道。 至少一个传感器或流体的温度可以指示流体的状态，例如流速和气泡和颗粒物质的存在。

公开(公告)号：US07697192B2

公开(公告)日：2010-04-13

申请号：US12417430

申请日：2009-04-02

Applicant: Matthias Wagner ,  Shuyun Wu ,  Charles M. Marshall ,  Eugene Y. Ma ,  John F. Heanue

Inventor： Matthias Wagner ,  Shuyun Wu ,  Charles M. Marshall ,  Eugene Y. Ma ,  John F. Heanue

IPC: G02F1/01 ,  G02B27/00

CPC classification number: G02F1/0147 ,  G02B5/284 ,  G02F1/21 ,  G02F2001/213

Abstract: A thin-film interference filter structure has a generally wavelength-dependent resonant response to incident optical energy in a predetermined range of wavelengths. The thin-film interference filter structure includes a thermally tunable layer having a thermally tunable optical characteristic such that a range of wavelength-dependent resonant optical responses of the thermally tunable layer are induced by a corresponding range of thermal conditions of the thermally tunable layer. The thin-film interference filter structure is configured to (1) receive a spatially varying pattern of thermal energy at the thermally tunable layer to impart a corresponding spatially varying pattern to the thermally tunable characteristic of the thermally tunable layer, and (2) receive the incident optical energy into the thermally tunable layer and output optical energy having spatial modulation corresponding to the spatially varying pattern of the thermally tunable characteristic.

Abstract translation: 薄膜干涉滤光器结构对预定波长范围内的入射光能具有大致波长依赖的谐振响应。 薄膜干涉滤光器结构包括具有热可调谐光学特性的热可调谐层，使得热可调谐层的波长依赖性共振光学响应的​​范围由热可调谐层的相应热条件范围引起。 薄膜干涉滤光器结构被配置为（1）在热可调谐层处接收空间上变化的热能图案，以向热可调谐层的热可调谐特性赋予相应的空间变化图案，以及（2） 入射到光可调谐层中的光能，并且输出具有与热可调谐特性的空间变化图案相对应的空间调制的光能。

公开(公告)号：US20090026370A1

公开(公告)日：2009-01-29

申请号：US12176931

申请日：2008-07-21

Applicant: Matthias WAGNER ,  Shuyun WU ,  Eugene Y. MA

Inventor： Matthias WAGNER ,  Shuyun WU ,  Eugene Y. MA

IPC: G03G5/16

CPC classification number: G01J5/58 ,  G01J5/00 ,  G01J2005/0077 ,  H01L27/14603 ,  H01L27/1462 ,  H01L27/14649 ,  H01L27/14687

Abstract: A thermal imaging device including: a substrate; and an array of thermally tunable pixel elements for generating a thermal image, each thermally tunable pixel element including: a plurality of thermally tunable filter islands, each of which has a thermally tunable optical filter, wherein each of the plurality of tunable filter islands within that pixel element is thermally isolated from the other tunable filter islands within that tunable pixel element; an absorption structure for absorbing incident optical thermal energy; and a mechanical structure supporting the plurality of tunable filter islands and the absorption structure on the substrate.

Abstract translation: 一种热成像装置，包括：基板; 以及用于产生热图像的热可调节像素元件阵列，每个热可调谐像素元件包括：多个热可调谐滤光片岛，每个散热岛具有热可调光滤光器，其中该可调谐滤光片岛中的每一个在该可调谐滤光片岛内 像素元件与该可调谐像素元件内的其它可调谐滤光片岛热隔离; 用于吸收入射光学热能的吸收结构; 以及支撑多个可调谐滤光片岛和基片上的吸收结构的机械结构。

公开(公告)号：US06672629B2

公开(公告)日：2004-01-06

申请号：US10198013

申请日：2002-07-18

Applicant: Yu-Chong Tai ,  Shuyun Wu ,  Ellis Fan-chuin Meng

Inventor： Yu-Chong Tai ,  Shuyun Wu ,  Ellis Fan-chuin Meng

IPC: F16L1700

CPC classification number: B81B1/00 ,  B81B2201/13

Abstract: A micromachined coupler for coupling a capillary having a first size to an orifice having a shape and a second size, has a body which has a shape conforming the shape of the cavity into which the body must fit. A through hole is defined through the body. The through hole has a size conforming to the first size of the capillary. The capillary is disposable into the through hole so that the capillary is communicated to the orifice without the first and second sizes necessarily being the same. The cavity and the body have conforming slanting surfaces, and in particular the cavity and the body define truncated pyramidal shapes. The cavity and the body each have a truncated pyramidal shape. The pyramidal shape may be square, triangular, or conical. A method of fabricating the micromachined coupler is achieved either by micromaching or micromolding.

Abstract translation: 用于将具有第一尺寸的毛细管耦合到具有形状和第二尺寸的孔口的微机械加工器具有具有与主体必须配合的空腔形状一致的形状的主体。 通孔穿过身体。 通孔的尺寸符合毛细管的第一尺寸。 毛细管一次性进入通孔，使得毛细管连通到孔口，而第一和第二尺寸必须相同。 空腔和主体具有一致的倾斜表面，特别是空腔和主体限定截锥形的形状。 空腔和身体各具有截头锥形。 锥体形状可以是正方形，三角形或圆锥形。 微加工耦合器的制造方法可以通过微机械加工或微型成型来实现。

公开(公告)号：US06428053B1

公开(公告)日：2002-08-06

申请号：US09516487

申请日：2000-03-01

Applicant: Yu-Chong Tai ,  Shuyun Wu

Inventor： Yu-Chong Tai ,  Shuyun Wu

IPC: F16L5700

CPC classification number: B81B1/00 ,  B81B2201/13

Abstract: A micromachined coupler for coupling a capillary having a first size to an orifice having a shape and a second size, has a body which has a shape conforming the shape of the cavity into which the body must fit. A through hole is defined through the body. The through hole has a size conforming to the first size of the capillary. The capillary is disposable into the through hole so that the capillary is communicated to the orifice without the first and second sizes necessarily being the same. The cavity and the body have conforming slanting surfaces, and in particular the cavity and the body define truncated pyramidal shapes. The cavity and the body each have a truncated pyramidal shape. The pyramidal shape may be square, triangular, or conical. A method of fabricating the micromachined coupler is achieved either by micromaching or micromolding.

Abstract translation: 用于将具有第一尺寸的毛细管耦合到具有形状和第二尺寸的孔口的微机械加工器具有具有与主体必须配合的空腔形状一致的形状的主体。 通孔穿过身体。 通孔的尺寸符合毛细管的第一尺寸。 毛细管一次性进入通孔，使得毛细管连通到孔口，而第一和第二尺寸必须相同。 空腔和主体具有一致的倾斜表面，特别是空腔和主体限定截锥形的形状。 空腔和身体各具有截头锥形。 锥体形状可以是正方形，三角形或圆锥形。 微加工耦合器的制造方法可以通过微机械加工或微型成型来实现。

公开(公告)号：US07829854B2

公开(公告)日：2010-11-09

申请号：US12176931

申请日：2008-07-21

Applicant: Matthias Wagner ,  Shuyun Wu ,  Eugene Y. Ma

Inventor： Matthias Wagner ,  Shuyun Wu ,  Eugene Y. Ma

IPC: G01J5/62 ,  G01J5/00

CPC classification number: G01J5/58 ,  G01J5/00 ,  G01J2005/0077 ,  H01L27/14603 ,  H01L27/1462 ,  H01L27/14649 ,  H01L27/14687

Abstract: A thermal imaging device including: a substrate; and an array of thermally tunable pixel elements for generating a thermal image, each thermally tunable pixel element including: a plurality of thermally tunable filter islands, each of which has a thermally tunable optical filter, wherein each of the plurality of tunable filter islands within that pixel element is thermally isolated from the other tunable filter islands within that tunable pixel element; an absorption structure for absorbing incident optical thermal energy; and a mechanical structure supporting the plurality of tunable filter islands and the absorption structure on the substrate.

Abstract translation: 一种热成像装置，包括：基板; 以及用于产生热图像的热可调节像素元件阵列，每个热可调谐像素元件包括：多个热可调谐滤光片岛，每个散热岛具有热可调光滤光器，其中该可调谐滤光片岛中的每一个在该可调谐滤光片岛内 像素元件与该可调谐像素元件内的其它可调谐滤光片岛热隔离; 用于吸收入射光学热能的吸收结构; 以及支撑多个可调谐滤光片岛和基片上的吸收结构的机械结构。

公开(公告)号：US20080088906A1

公开(公告)日：2008-04-17

申请号：US11803044

申请日：2007-05-11

Applicant: Matthias Wagner ,  Shuyun Wu ,  Charles M. Marshall ,  Eugene Y. Ma ,  John F. Heanue

Inventor： Matthias Wagner ,  Shuyun Wu ,  Charles M. Marshall ,  Eugene Y. Ma ,  John F. Heanue

IPC: G02F1/00

CPC classification number: G02F1/0147 ,  G02B5/284 ,  G02F1/21 ,  G02F2001/213

Abstract: An apparatus includes a thin-film interference filter structure having a generally wavelength-dependent resonant response to incident optical energy in a predetermined range of wavelengths. The thin-film interference filter structure includes a thermally tunable layer having a thermally tunable optical characteristic such that a range of wavelength-dependent resonant optical responses of the thermally tunable layer are induced by a corresponding range of thermal conditions of the thermally tunable layer. The thin-film interference filter structure is configured to (1) receive a spatially varying pattern of thermal energy at the thermally tunable layer to impart a corresponding spatially varying pattern to the thermally tunable characteristic of the thermally tunable layer, and (2) receive the incident optical energy into the thermally tunable layer and output optical energy having spatial modulation corresponding to the spatially varying pattern of the thermally tunable characteristic.

Abstract translation: 一种装置包括对预定波长范围内的入射光能具有大致波长依赖的谐振响应的薄膜干涉滤波器结构。 薄膜干涉滤光器结构包括具有热可调谐光学特性的热可调谐层，使得热可调谐层的波长依赖性共振光学响应的​​范围由热可调谐层的相应热条件范围引起。 薄膜干涉滤光器结构被配置为（1）在热可调层处接收空间上变化的热能图案，以向热可调谐层的热可调谐特性赋予相应的空间变化图案，以及（2） 入射到光可调谐层中的光能，并且输出具有与热可调谐特性的空间变化图案相对应的空间调制的光能。

公开(公告)号：US08633448B1

公开(公告)日：2014-01-21

申请号：US13467664

申请日：2012-05-09

Applicant: Steve (Shuyun) Wu ,  Jing Zhao

Inventor： Steve (Shuyun) Wu ,  Jing Zhao

IPC: H01J47/00

CPC classification number: H01J47/062

Abstract: Micro-machined gaseous radiation detector that includes arrays of micro scale detector cells which have a small distance between the anode and cathode and require lower voltages.

Abstract translation: 微加工气体辐射检测器，其包括在阳极和阴极之间具有小距离并且需要较低电压的微尺度检测器单元阵列。

公开(公告)号：US20090195859A1

公开(公告)日：2009-08-06

申请号：US12417430

申请日：2009-04-02

Applicant: Matthias Wagner ,  Shuyun Wu ,  Charles M. Marshall ,  Eugene Y. Ma ,  John F. Heanue

Inventor： Matthias Wagner ,  Shuyun Wu ,  Charles M. Marshall ,  Eugene Y. Ma ,  John F. Heanue

IPC: G02F1/29

CPC classification number: G02F1/0147 ,  G02B5/284 ,  G02F1/21 ,  G02F2001/213

Abstract: A thin-film interference filter structure has a generally wavelength-dependent resonant response to incident optical energy in a predetermined range of wavelengths. The thin-film interference filter structure includes a thermally tunable layer having a thermally tunable optical characteristic such that a range of wavelength-dependent resonant optical responses of the thermally tunable layer are induced by a corresponding range of thermal conditions of the thermally tunable layer. The thin-film interference filter structure is configured to (1) receive a spatially varying pattern of thermal energy at the thermally tunable layer to impart a corresponding spatially varying pattern to the thermally tunable characteristic of the thermally tunable layer, and (2) receive the incident optical energy into the thermally tunable layer and output optical energy having spatial modulation corresponding to the spatially varying pattern of the thermally tunable characteristic.

Abstract translation: 薄膜干涉滤光器结构对预定波长范围内的入射光能具有大致波长依赖的谐振响应。 薄膜干涉滤光器结构包括具有热可调谐光学特性的热可调谐层，使得热可调谐层的波长依赖性共振光学响应的​​范围由热可调谐层的相应热条件范围引起。 薄膜干涉滤光器结构被配置为（1）在热可调层处接收空间上变化的热能图案，以向热可调谐层的热可调谐特性赋予相应的空间变化图案，以及（2） 入射到光可调谐层中的光能，并且输出具有与热可调谐特性的空间变化图案相对应的空间调制的光能。

公开(公告)号：US07522328B2

公开(公告)日：2009-04-21

申请号：US11803044

申请日：2007-05-11

Applicant: Matthias Wagner ,  Shuyun Wu ,  Charles M. Marshall ,  Eugene Y. Ma ,  John F. Heanue

Inventor： Matthias Wagner ,  Shuyun Wu ,  Charles M. Marshall ,  Eugene Y. Ma ,  John F. Heanue

IPC: G02B26/00 ,  G02B27/00

CPC classification number: G02F1/0147 ,  G02B5/284 ,  G02F1/21 ,  G02F2001/213

Abstract: An apparatus includes a thin-film interference filter structure having a generally wavelength-dependent resonant response to incident optical energy in a predetermined range of wavelengths. The thin-film interference filter structure includes a thermally tunable layer having a thermally tunable optical characteristic such that a range of wavelength-dependent resonant optical responses of the thermally tunable layer are induced by a corresponding range of thermal conditions of the thermally tunable layer. The thin-film interference filter structure is configured to (1) receive a spatially varying pattern of thermal energy at the thermally tunable layer to impart a corresponding spatially varying pattern to the thermally tunable characteristic of the thermally tunable layer, and (2) receive the incident optical energy into the thermally tunable layer and output optical energy having spatial modulation corresponding to the spatially varying pattern of the thermally tunable characteristic.

Abstract translation: 一种装置包括对预定波长范围内的入射光能具有大致波长依赖的谐振响应的薄膜干涉滤波器结构。 薄膜干涉滤光器结构包括具有热可调谐光学特性的热可调谐层，使得热可调谐层的波长依赖性共振光学响应的​​范围由热可调谐层的相应热条件范围引起。 薄膜干涉滤光器结构被配置为（1）在热可调层处接收空间上变化的热能图案，以向热可调谐层的热可调谐特性赋予相应的空间变化图案，以及（2） 入射到光可调谐层中的光能，并且输出具有与热可调谐特性的空间变化图案相对应的空间调制的光能。