发明授权
- 专利标题: Method for forming electrical contact to the optical coating of an infrared detector
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申请号: US711224申请日: 1996-08-30
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公开(公告)号: US5737818A公开(公告)日: 1998-04-14
- 发明人: Steven N. Frank , James F. Belcher , Charles E. Stanford , Robert A. Owen , Robert J. S. Kyle
- 申请人: Steven N. Frank , James F. Belcher , Charles E. Stanford , Robert A. Owen , Robert J. S. Kyle
- 申请人地址: TX Dallas
- 专利权人: Texas Instrument Incorporated
- 当前专利权人: Texas Instrument Incorporated
- 当前专利权人地址: TX Dallas
- 主分类号: G01J5/34
- IPC分类号: G01J5/34 ; H01L37/02 ; H01L31/18
摘要:
This is a system and method of forming an electrical contact to the optical coating of an infrared detector. The method may comprise: forming thermal isolation trenches 22 and contact vias 23 in a substrate 20; depositing a bias contact metal 32 into the vias 23 forming biasing contact areas around a periphery of the substrate 20; depositing a first trench filler 24 in the trenches 22 and vias 23; replanarizing; depositing a common electrode layer 25 over the thermal isolation trenches and the biasing contact areas; mechanically thinning the substrate 20 to expose the biasing contact area 32 and the trench filler 24; depositing a contact metal 34 on the backside of the substrate 20, the exposed trench filler 24 and the exposed bias contact area; and etching the contact metal 34 and the trench filler 24 to form pixel mesas of the contact metal 34 and the substrate 20. The thermal isolation trenches 22 and the bias contact vias 23 may be formed by ion milling or laser vaporization. Alternately, the bias contact areas 23 may be formed by performing laser vaporization on the substrate 20 to produce conductive 23 areas within the substrate.
公开/授权文献
- US5209815A Method for forming patterned films on a substrate 公开/授权日:1993-05-11
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