发明授权
- 专利标题: Flexible vacuum pick-up device
- 专利标题(中): 柔性真空吸尘装置
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申请号: US764327申请日: 1996-12-12
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公开(公告)号: US5746462A公开(公告)日: 1998-05-05
- 发明人: C. H. Lee , Y. H. Chen
- 申请人: C. H. Lee , Y. H. Chen
- 申请人地址: TWX Hsin-Chu
- 专利权人: Taiwan Semiconductor Manufacturing Company,Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Company,Ltd.
- 当前专利权人地址: TWX Hsin-Chu
- 主分类号: B25J1/02
- IPC分类号: B25J1/02 ; B25J15/06 ; H01L21/683
摘要:
The present invention discloses a flexible vacuum pick-up device for use in wafer processing that includes a handle portion adapted for holding by a human hand, the handle portion has a passage therein for fluid communication, a flexible conduit for providing a connection between the handle portion and a pick-up head and for providing a vacuum passage therethrough, and a vacuum pick-up head that has an extended planar surface adapted for making intimate contact with a substantially flat wafer.
公开/授权文献
- US4670360A Fuel cell 公开/授权日:1987-06-02
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