- Patent Title: Surface acoustic wave device and diamond base material for the same
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Application No.: US521382Application Date: 1995-06-16
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Publication No.: US5750243APublication Date: 1998-05-12
- Inventor: Shin-ichi Shikata , Hideaki Nakahata , Kenjiro Higaki , Satoshi Fujii , Akihiro Hachigo
- Applicant: Shin-ichi Shikata , Hideaki Nakahata , Kenjiro Higaki , Satoshi Fujii , Akihiro Hachigo
- Applicant Address: JPX
- Assignee: Sumitomo Electric Industries, Ltd.
- Current Assignee: Sumitomo Electric Industries, Ltd.
- Current Assignee Address: JPX
- Priority: JPX6-137628 19940620
- Main IPC: H03H3/08
- IPC: H03H3/08 ; H03H9/02 ; H03H9/145 ; H03H9/25 ; H03H9/64
Abstract:
A diamond base material for surface acoustic wave device, which includes: a low-resistivity base material, and a high-resistivity diamond layer having a thickness of 5-50 .mu.m disposed on the low-resistivity base material.
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