发明授权
- 专利标题: Vessel of pyrolytic boron nitride
- 专利标题(中): 热解氮化硼的容器
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申请号: US699148申请日: 1996-08-16
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公开(公告)号: US5759646A公开(公告)日: 1998-06-02
- 发明人: Shoji Kano , Nobuo Kawada , Ryoji Nakajima , Yukio Kurosawa
- 申请人: Shoji Kano , Nobuo Kawada , Ryoji Nakajima , Yukio Kurosawa
- 申请人地址: JPX Tokyo
- 专利权人: Shin-Etsu Chemical Co., Ltd.
- 当前专利权人: Shin-Etsu Chemical Co., Ltd.
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX7-213228 19950822
- 主分类号: C04B41/87
- IPC分类号: C04B41/87 ; C04B35/583 ; C04B41/50 ; C04B41/51 ; C04B41/85 ; C04B41/88 ; C30B15/10 ; C30B23/06 ; C30B35/00 ; H01L21/203 ; B01L3/04
摘要:
Proposed is an improvement in a vessel, e.g., crucible, of pyrolytic boron nitride (PBN) used, for example, in the process of molecular beam epitaxy for melting silicon and the like at a high temperature. Different from conventional PBN crucibles used for such a process, in which contamination of high-purity silicon is unavoidable by the reaction of molten silicon with PBN or a thermal decomposition products of boron nitride, the inventive PBN vessel is provided on the surface with a protective coating layer of pyrolytic graphite or a refractory metal such as platinum so as not to cause troubles due to contamination of high-purity silicon melted therein with the crucible materials.
公开/授权文献
- US5196331A Cloning the MspI restriction and modification genes 公开/授权日:1993-03-23
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