A semiconductor device having a plurality of elements arranged in a one-dimensional or a two-dimensional array includes indices for identifying positions of elements in the device formed in at least one of a horizontal direction and a vertical direction on a semiconductor layer externally of the array of the elements. The indices comprise contact sections connecting different layers of different configurations. The indices can be through-holes or contacts of different shapes, which are different in shape at every 10n-th row and every 100m-th column of the array of the semiconductor elements for use as the addresses of the elements.