发明授权
- 专利标题: Method and apparatus for optically measuring specimen
- 专利标题(中): 用于光学测量样品的方法和设备
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申请号: US8993申请日: 1993-01-26
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公开(公告)号: US5760900A公开(公告)日: 1998-06-02
- 发明人: Yuji Ito , Yoshiyuki Toge , Atsushi Saito , Tatsuya Yamazaki , Moritoshi Miyamoto
- 申请人: Yuji Ito , Yoshiyuki Toge , Atsushi Saito , Tatsuya Yamazaki , Moritoshi Miyamoto
- 申请人地址: JPX Tokyo
- 专利权人: Canon Kabushiki Kaisha
- 当前专利权人: Canon Kabushiki Kaisha
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX1-067363 19890318; JPX1-156185 19890619; JPX1-325001 19891215; JPX1-325011 19891215; JPX2-016553 19900126; JPX2-318978 19901121; JPX2-318986 19901121; JPX2-318988 19901121; JPX2-318989 19901121
- 主分类号: G01N15/14
- IPC分类号: G01N15/14 ; G01N21/64
摘要:
A specimen measurement apparatus and method includes sequentially moving individual specimens, radiating first and second radiation beams on first and second positions spaced apart from each other in a moving direction of the specimens, time-serially detecting light components emerging from specimens passing the first and second positions using the same light detector, and an optical selector, arranged in an optical path between the radiation positions and a light detector, for, when a specimen passes the first position, selectively guiding a light component having a first optical characteristic emerging from the specimen to the light detector, and for, when the specimen passes the second position, selectively guiding a light component having a second optical characteristic emerging from the specimen to the light detector.
公开/授权文献
- USD360268S Flashlight 公开/授权日:1995-07-11
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