发明授权
- 专利标题: Fly-eye lens, illumination optical apparatus, and exposure apparatus
- 专利标题(中): 飞眼镜片,照明光学装置和曝光装置
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申请号: US619252申请日: 1996-03-21
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公开(公告)号: US5760963A公开(公告)日: 1998-06-02
- 发明人: Takashi Mori
- 申请人: Takashi Mori
- 申请人地址: JPX Tokyo
- 专利权人: Nikon Corporation
- 当前专利权人: Nikon Corporation
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX7-062429 19950322
- 主分类号: G02F1/13
- IPC分类号: G02F1/13 ; G02B3/00 ; G02B5/02 ; G02B13/14 ; G02B27/18 ; G03F7/20 ; G02B27/10
摘要:
A fly-eye lens in accordance with the present invention comprises a plurality of lens elements which are arranged in two-dimensionally close contact with each other so as to connect light-entering and light-exit surfaces of the lens elements to each other, while at least three refractive surfaces with a predetermined refractive power are disposed between the light-entering and light-exit surfaces in each of the lens elements. Here, each of the plurality of lens elements has an identical focal length f and, concering a bundle of rays which enters each of the lens elements in parallel to its optical axis with a maximum incident height h.sub.max and then is emitted therefrom with an exit angle .theta..sub.max, substantially satisfies a conditional expression: h.sub.max =f.multidot.sin .theta..sub.max Accordingly, the plurality of lens elements substantially satisfy a sine condition, whereby the fly-eye lens forms a perfect diffusing surface light source.
公开/授权文献
- US4597950A Gas separating-crystallizer 公开/授权日:1986-07-01
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