发明授权
- 专利标题: Photoresist and compounds for composing the photoresist
- 专利标题(中): 用于构成光致抗蚀剂的光致抗蚀剂和化合物
-
申请号: US763055申请日: 1996-12-10
-
公开(公告)号: US5770346A公开(公告)日: 1998-06-23
- 发明人: Shigeyuki Iwasa , Kaichiro Nakano , Katsumi Maeda , Takeshi Ohfuji , Etsuo Hasegawa
- 申请人: Shigeyuki Iwasa , Kaichiro Nakano , Katsumi Maeda , Takeshi Ohfuji , Etsuo Hasegawa
- 申请人地址: JPX Tokyo
- 专利权人: NEC Corporation
- 当前专利权人: NEC Corporation
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX7-322039 19951211; JPX8-234228 19960904
- 主分类号: C07C62/38
- IPC分类号: C07C62/38 ; C07C69/73 ; C08F20/26 ; C08F20/28 ; C09D133/04 ; C09D133/14 ; G03F7/004 ; G03F7/029 ; G03F7/033 ; G03F7/039 ; H01L21/027
摘要:
There is provided a photoresist including (a) a resin composed of a polymer having a compound represented with the following general formula �1! within a structural unit thereof, and (b) a photo acid generator. ##STR1## wherein R.sup.1 represents a hydrogen atom, R.sup.2 represents a divalent hydrocarbon group including a bridged cyclic hydrocarbon group and having a carbon number in the range of 7 to 13 both inclusive, R.sup.3 and R.sup.4 represent a hydrocarbon group having a carbon number of 1 or 2, and R.sup.5 represents one of (a) a hydrocarbon group having a carbon number of 1 to 12, (b) a hydrocarbon group having a carbon number of 1 to 12 and replaced with an alkoxy group having a carbon number of 1 to 12, and (c) a hydrocarbon group having a carbon number of 1 to 12 and replaced with an acyl group having a carbon number of 1 to 13. The above mentioned photoresist produces no extra polymer by side reaction. Thus, the photoresist makes it possible to form a fine pattern without resist residue, and has superior thermal stability.
公开/授权文献
- US4617820A Level calibrating device 公开/授权日:1986-10-21
信息查询