发明授权
US5770948A Rotary signal coupling for chemical mechanical polishing endpoint
detection with a strasbaugh tool
失效
旋转信号耦合用于化学机械抛光终点检测与strasbaugh工具
- 专利标题： Rotary signal coupling for chemical mechanical polishing endpoint detection with a strasbaugh tool
- 专利标题（中）： 旋转信号耦合用于化学机械抛光终点检测与strasbaugh工具
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申请号： US620723申请日： 1996-03-19
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公开(公告)号： US5770948A公开(公告)日： 1998-06-23
- 发明人: Leping Li , Steven George Barbee , Arnold Halperin , Richard Mars Ruggiero , William Joseph Surovie
- 申请人： Leping Li , Steven George Barbee , Arnold Halperin , Richard Mars Ruggiero , William Joseph Surovie
- 申请人地址： NY Armonk
- 专利权人： International Business Machines Corporation
- 当前专利权人： International Business Machines Corporation
- 当前专利权人地址： NY Armonk
- 主分类号： B24B37/013
- IPC分类号： B24B37/013 ; B24B37/24 ; B24B37/26 ; G01B7/06 ; H01L21/302
摘要：
An apparatus for rotary signal coupling in in-situ monitoring of a chemical-mechanical polishing process by a polisher is provided with a sensor fixed to a rotatable wafer carrier for creating a signal responsive to the chemical mechanical polishing process, a conductor coupled to the sensor for receiving the signal, the conductor fixed to the rotatable wafer carrier, a contact coupled to the conductor, the contact fixed to a stationary drive arm, and signal transfer means coupled to the contact for transferring the signal to a monitoring means.
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