发明授权
US5773316A Method and device for measuring physical quantity, method for fabricating semiconductor device, and method and device for measuring wavelength 失效
用于测量物理量的方法和装置,制造半导体器件的方法以及用于测量波长的方法和装置

Method and device for measuring physical quantity, method for
fabricating semiconductor device, and method and device for measuring
wavelength
摘要:
Pulsed laser beams are applied to an object to be measured. A first laser beam of a pulsed laser beam having a first wavelength which is oscillated immediately after the rise of the pulsed laser beam, and a second laser beam having a second wavelength which is oscillated thereafter are used. Based on a difference between an intensity of first interfered light of reflected light of the first laser beam or transmitted light thereof, and an intensity of reflected light of the second laser beam or transmitted light thereof, temperatures of the object to be measured, and whether the temperatures are on increase or on decrease are judged. The method and device can be realized by simple structures and can measure a direction of changes of the physical quantities.
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