发明授权
US5773316A Method and device for measuring physical quantity, method for
fabricating semiconductor device, and method and device for measuring
wavelength
失效
用于测量物理量的方法和装置,制造半导体器件的方法以及用于测量波长的方法和装置
- 专利标题: Method and device for measuring physical quantity, method for fabricating semiconductor device, and method and device for measuring wavelength
- 专利标题(中): 用于测量物理量的方法和装置,制造半导体器件的方法以及用于测量波长的方法和装置
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申请号: US401689申请日: 1995-03-10
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公开(公告)号: US5773316A公开(公告)日: 1998-06-30
- 发明人: Ryo Kurosaki , Jun Kikuchi , Haruhiko Serizawa , Shuzo Fujimura
- 申请人: Ryo Kurosaki , Jun Kikuchi , Haruhiko Serizawa , Shuzo Fujimura
- 申请人地址: JPX Kawasaki
- 专利权人: Fujitsu Limited
- 当前专利权人: Fujitsu Limited
- 当前专利权人地址: JPX Kawasaki
- 优先权: JPX6-040274 19940311; JPX6-118758 19940531; JPX6-225187 19940920; JPX6-252903 19940920
- 主分类号: G01K11/00
- IPC分类号: G01K11/00 ; H01L21/66 ; G01R31/26
摘要:
Pulsed laser beams are applied to an object to be measured. A first laser beam of a pulsed laser beam having a first wavelength which is oscillated immediately after the rise of the pulsed laser beam, and a second laser beam having a second wavelength which is oscillated thereafter are used. Based on a difference between an intensity of first interfered light of reflected light of the first laser beam or transmitted light thereof, and an intensity of reflected light of the second laser beam or transmitted light thereof, temperatures of the object to be measured, and whether the temperatures are on increase or on decrease are judged. The method and device can be realized by simple structures and can measure a direction of changes of the physical quantities.
公开/授权文献
- US4920766A Receiver for refrigerant apparatus 公开/授权日:1990-05-01
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