发明授权
- 专利标题： Method for washing objects
- 专利标题（中）： 清洗物品的方法
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申请号： US789537申请日： 1997-01-27
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公开(公告)号： US5782990A公开(公告)日： 1998-07-21
- 发明人: Shinya Murakami , Yuuji Kamikawa , Sinichiro Izumi , Noriyuki Anai , Takami Satoh , Hirofumi Shiraishi , Koji Harada , Takayuki Tomoeda , Hiroshi Tanaka
- 申请人： Shinya Murakami , Yuuji Kamikawa , Sinichiro Izumi , Noriyuki Anai , Takami Satoh , Hirofumi Shiraishi , Koji Harada , Takayuki Tomoeda , Hiroshi Tanaka
- 申请人地址： JPX Tokyo JPX Tosu
- 专利权人： Tokyo Electron Limited,Tokyo Electron Saga Limited
- 当前专利权人： Tokyo Electron Limited,Tokyo Electron Saga Limited
- 当前专利权人地址： JPX Tokyo JPX Tosu
- 优先权： JPX3-131673 19910508; JPX3-135301 19910513; JPX3-135303 19910513
- 主分类号： B08B3/02
- IPC分类号： B08B3/02 ; B08B3/04 ; B08B3/10 ; H01L21/00 ; H01L21/677
摘要：
A washing method for washing objects includes the steps of supplying a washing liquid to a washing vessel and immersing objects in the washing liquid contained in the washing vessel. The method also includes the steps of discharging the liquid at least once from the washing vessel, and starting to apply the washing liquid to the objects when the objects are partly exposed to air as the liquid is discharged from the washing vessel. The washing liquid application is continued during exposure of the objects to the air to prevent the surface of the objects from being dried and stained.
公开/授权文献
- US5396258A Plasma display control system 公开/授权日：1995-03-07
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