- 专利标题： Semiconductor processing systems
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申请号： US881682申请日： 1997-06-24
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公开(公告)号： US5784802A公开(公告)日： 1998-07-28
- 发明人: Raymon F. Thompson , Robert W. Berner , Gary L. Curtis , Stephen P. Culliton , Blaine G. Wright
- 申请人： Raymon F. Thompson , Robert W. Berner , Gary L. Curtis , Stephen P. Culliton , Blaine G. Wright
- 申请人地址： MT Kalispell
- 专利权人： Semitool, Inc.
- 当前专利权人： Semitool, Inc.
- 当前专利权人地址： MT Kalispell
- 主分类号： B65G49/07
- IPC分类号： B65G49/07 ; H01L21/00 ; H01L21/673 ; H01L21/677 ; F26B5/08
摘要：
A processor for processing semiconductor articles, such as integrated circuit wafers, flat panel displays, semiconductor substrates, and data disks. The processor has an interface section which receives articles in article carriers. The interface section transfers the articles from carriers into processing arrays. A conveyor having an automated arm assembly moves article arrays to and between processing stations. The processing stations are accessed from an enclosed area adjoining the interface section.
公开/授权文献
- US4667392A Solid-state image sensor manufacturing process 公开/授权日：1987-05-26
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