发明授权
US5792954A Condition responsive sensor 失效
状态响应传感器

Condition responsive sensor
摘要:
A condition responsive capacitive transducer, such as an accelerometer, is shown using a material system having refractory metal for the sensing element and glass material for a supporting substrate. The refractory metal is preferably tungsten, tantalum or molybdenum, and is coated with a glass seal enhancing material, such as titanium or nickel.
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