发明授权
- 专利标题： Adaptive temperture controller and method of operation
- 专利标题（中）： 自适应温度控制器和操作方法
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申请号： US710158申请日： 1996-09-12
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公开(公告)号： US5793022A公开(公告)日： 1998-08-11
- 发明人: Kimberly E. Klinck , Brian M. Cooper , Harold J. Mellen, III
- 申请人： Kimberly E. Klinck , Brian M. Cooper , Harold J. Mellen, III
- 申请人地址： CA Santa Clara
- 专利权人： Applied Materials, Inc.
- 当前专利权人： Applied Materials, Inc.
- 当前专利权人地址： CA Santa Clara
- 主分类号： H05B3/00
- IPC分类号： H05B3/00 ; G05B13/02 ; H01L21/26 ; H05B1/02
摘要：
An adaptive controller for controlling the temperature of a body. The adaptive controller of the present invention comprises a temperature measuring device which measures the temperature of the body. A controller which has a controller integral time constant and a controller gain constant is provided for controlling a heating device. An adjustment mechanism is provided which determines the controller integral time constant and the controller gain constant where the controller integral time constant and the controller gain constant are dependent upon the difference between the present temperature of the body and the desired temperature of the body.
公开/授权文献
- US5251053A Radio communication system 公开/授权日：1993-10-05
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