发明授权
US5796648A Nonvolatile semiconductor memory device and method for manufacturing same
失效
非易失性半导体存储器件及其制造方法
- 专利标题: Nonvolatile semiconductor memory device and method for manufacturing same
- 专利标题(中): 非易失性半导体存储器件及其制造方法
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申请号: US762923申请日: 1996-12-10
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公开(公告)号: US5796648A公开(公告)日: 1998-08-18
- 发明人: Takashi Kawakubo , Kazuhide Abe
- 申请人: Takashi Kawakubo , Kazuhide Abe
- 申请人地址: JPX Kawasaki
- 专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人地址: JPX Kawasaki
- 优先权: JPX7-321698 19951211
- 主分类号: H01L27/04
- IPC分类号: H01L27/04 ; G11C11/22 ; H01L21/02 ; H01L21/822 ; H01L21/8246 ; H01L27/10 ; H01L27/105 ; H01L27/115
摘要:
A nonvolatile semiconductor memory device has a ferroelectric cell and a paraelectric cell. The ferroelectric cell includes a first thin-film capacitor which has a first lower electrode formed on a substrate, a first dielectric film grown on the first lower electrode and a first upper electrode formed on the first dielectric film, and a first switching transistor connected to the first thin-film capacitor. The paraelectric cell includes a second thin-film capacitor which has a second lower electrode, a second dielectric film grown on the second lower electrode and a second upper electrode formed on the second dielectric film, and a second switching transistor connected to the second thin-film capacitor. The first lower electrode is provided such that the first dielectric film has ferroelectricities, while the second lower electrode is provided such that the second dielectric film has paraelectricities.
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