发明授权
- 专利标题: High aspect ratio metal microstructures and method for preparing the same
- 专利标题(中): 高纵横比金属微结构及其制备方法
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申请号: US601825申请日: 1996-02-15
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公开(公告)号: US5814414A公开(公告)日: 1998-09-29
- 发明人: Jacque H. Georger, Jr. , Martin C. Peckerar , Milton L. Rebbert , Jeffrey M. Calvert , James J. Hickman
- 申请人: Jacque H. Georger, Jr. , Martin C. Peckerar , Milton L. Rebbert , Jeffrey M. Calvert , James J. Hickman
- 申请人地址: DC Washington MA Newton Centre
- 专利权人: The United States of America as represented by the Secretary of the Navy,Geo-Center, Inc.
- 当前专利权人: The United States of America as represented by the Secretary of the Navy,Geo-Center, Inc.
- 当前专利权人地址: DC Washington MA Newton Centre
- 主分类号: G03F1/00
- IPC分类号: G03F1/00 ; G03F7/00 ; G03F7/40 ; B21F21/00 ; B21G1/08
摘要:
High aspect ratio metal microstructures may be prepared by a method involving (i) forming a layer of a photoresist on a substrate; (ii) exposing the layer to actinic radiation in an imagewise manner and developing the exposed layer to obtain a surface which contains regions having no remaining photoresist and regions covered with photoresist; (iii) metallizing the surface to form a layer of metal on the region of the surface having no remaining photoresist and on the sides of the regions of photoresist remaining on the surface; and (iv) optionally, stripping the photoresist remaining on the surface. Such microstructures are useful as electron emitters, anisotropic high dielectric interconnects, masks for x-ray photolithography, carriers for the controlled release of active agents, and ultramicroelectrode arrays.
公开/授权文献
- US4587186A Mask element for selective sandblasting and a method 公开/授权日:1986-05-06
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