发明授权
- 专利标题: Position detecting device
- 专利标题(中): 位置检测装置
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申请号: US958478申请日: 1997-10-28
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公开(公告)号: US5815094A公开(公告)日: 1998-09-29
- 发明人: Hiroshi Okano , Yoshiharu Shiokama , Shinichi Ushio , Kazumitsu Takezawa
- 申请人: Hiroshi Okano , Yoshiharu Shiokama , Shinichi Ushio , Kazumitsu Takezawa
- 申请人地址: JPX Tokyo
- 专利权人: Nikon Corporation
- 当前专利权人: Nikon Corporation
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX3-145591 19910521; JPX3-145592 19910521; JPX3-063081 19910715
- 主分类号: G01D5/244
- IPC分类号: G01D5/244 ; G01D5/249 ; G01D5/25 ; H03M1/10 ; H03M1/24 ; H03M1/22
摘要:
A position detecting device comprises a pattern member having conductive patterns arranged in plural tracks; a slidable member having plural sliding pieces capable of sliding on the conductive patterns, wherein each of the sliding pieces assumes either a conductive state in contact with one of the conductive patterns or a non-conductive state not in contact with the conductive pattern; a signal processing device for detecting sets of the conductive patterns and the sliding pieces in conductive state, by transmitting electrical signals through the conductive patterns and the sliding pieces; and a discriminating device for identifying the relative position between the conductive patterns and the sliding pieces when the the conductive patterns and the sliding pieces in conductive state are detected at least a predetermined number of times or over at least a predetermined period of time.
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