发明授权
US5817171A Apparatus and method for producing single crystal using Czochralski
technique
失效
使用Czochralski技术生产单晶的装置和方法
- 专利标题: Apparatus and method for producing single crystal using Czochralski technique
- 专利标题(中): 使用Czochralski技术生产单晶的装置和方法
-
申请号: US655810申请日: 1996-05-31
-
公开(公告)号: US5817171A公开(公告)日: 1998-10-06
- 发明人: Masahiro Sakurada , Tomohiko Oota , Kiyotaka Takano , Masanori Kimura
- 申请人: Masahiro Sakurada , Tomohiko Oota , Kiyotaka Takano , Masanori Kimura
- 申请人地址: JPX Tokyo
- 专利权人: Shin-Etsu Handotai Co., Ltd.
- 当前专利权人: Shin-Etsu Handotai Co., Ltd.
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX7-143586 19950609
- 主分类号: C30B15/00
- IPC分类号: C30B15/00 ; C30B15/14 ; C30B33/02
摘要:
A puller and method for crystal growth using the Czochralski technique in which a temperature profile and a history of thermal conditions of a growing crystal is controllable with ease and a good accuracy, which puller comprises a crucible containing raw material, heater for melting by heating the raw material and a heat insulating cylinder surrounding them, the heat insulating cylinder being cross-sectionally divided by an annular separation gap or gaps into parts and which method is applicable to growth of such a single crystal as of silicon, germanium, GaP, GaAs or InP in the puller. Methods for controlling a temperature profile and a history of thermal conditions of a growing crystal using the czochralski technique in the puller.
公开/授权文献
- US5061194A Electrical connector lockout device 公开/授权日:1991-10-29
信息查询
IPC分类: