The invention relates to a method for manufacturing vacuum suction pads, in which, in addition to reductions of contaminant components, the material of vacuum suction pads is subjected to an improved surface treatment which prevents deposition of pad marks on work surfaces and reduces frictional resistance of suction pads on work surfaces to lessen their fatigue. Suction pads of synthetic rubber, to be connected to a vacuum source, are each formed with a thin halogenation-hardened layer at least on a sucking surfaces to be held in contact with a work surface.