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US5820810A Method of forming fine ceramics structure 失效
形成精细陶瓷结构的方法

Method of forming fine ceramics structure
摘要:
A method of forming a fine ceramics structure having columns with a fine pattern of width and a high aspect ratio includes steps of charging a plastic mold with a ceramics slurry, solidifying the ceramics slurry, and thereafter removing the plastic mold. The plastic mold is removed by heating the plastic mold in a vacuum, employing laser ablation, employing plasma etching, or employing a solvent of low viscosity dissolving plastic mold. Especially, the plastic mold is made of acrylic, the ceramics structure is made of lead zirconate titanate, and the mold is removed by laser ablation. The resulting fine pattern ceramics structure may have columns with an aspect ratio of at least 10, and particularly a height of 100 .mu.m and a diameter of 10 .mu.m.
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