发明授权
- 专利标题: Method of forming fine ceramics structure
- 专利标题(中): 形成精细陶瓷结构的方法
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申请号: US918512申请日: 1997-08-22
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公开(公告)号: US5820810A公开(公告)日: 1998-10-13
- 发明人: Yoshihiro Hirata
- 申请人: Yoshihiro Hirata
- 申请人地址: JPX Osaka
- 专利权人: Sumitomo Electric Industries, Ltd.
- 当前专利权人: Sumitomo Electric Industries, Ltd.
- 当前专利权人地址: JPX Osaka
- 优先权: JPX6-232825 19940928
- 主分类号: B28B13/06
- IPC分类号: B28B13/06 ; B28B1/26 ; B28B7/34 ; B81C99/00 ; H01L41/39 ; B29C33/40 ; B29C33/76
摘要:
A method of forming a fine ceramics structure having columns with a fine pattern of width and a high aspect ratio includes steps of charging a plastic mold with a ceramics slurry, solidifying the ceramics slurry, and thereafter removing the plastic mold. The plastic mold is removed by heating the plastic mold in a vacuum, employing laser ablation, employing plasma etching, or employing a solvent of low viscosity dissolving plastic mold. Especially, the plastic mold is made of acrylic, the ceramics structure is made of lead zirconate titanate, and the mold is removed by laser ablation. The resulting fine pattern ceramics structure may have columns with an aspect ratio of at least 10, and particularly a height of 100 .mu.m and a diameter of 10 .mu.m.
公开/授权文献
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