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US5821595A Carrier structure for transducers 失效
传感器的载体结构

Carrier structure for transducers
摘要:
A carrier structure for transducers. The semiconductor carrier structure mounts as a single unit to a force-impacted substrate and includes multiple piezoelectric elements integrally formed with the carrier structure, such that the elements are located in a space defining a window of the structure while maintaining their electrical contact and their precise position relative to the structure by use of thin-film, electrically conductive, metallic flexures attached to both the structure and the elements.
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