发明授权
- 专利标题: Carrier structure for transducers
- 专利标题(中): 传感器的载体结构
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申请号: US855091申请日: 1997-05-13
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公开(公告)号: US5821595A公开(公告)日: 1998-10-13
- 发明人: William S. Trimmer , Donald P. Weiss , Donald J. Summers , Stephen A. Raccio
- 申请人: William S. Trimmer , Donald P. Weiss , Donald J. Summers , Stephen A. Raccio
- 申请人地址: TX Dallas
- 专利权人: Dresser Industries, Inc.
- 当前专利权人: Dresser Industries, Inc.
- 当前专利权人地址: TX Dallas
- 主分类号: G01L9/00
- IPC分类号: G01L9/00 ; H01L29/82 ; H01L23/48 ; H01L23/52
摘要:
A carrier structure for transducers. The semiconductor carrier structure mounts as a single unit to a force-impacted substrate and includes multiple piezoelectric elements integrally formed with the carrier structure, such that the elements are located in a space defining a window of the structure while maintaining their electrical contact and their precise position relative to the structure by use of thin-film, electrically conductive, metallic flexures attached to both the structure and the elements.
公开/授权文献
- US5584004A Data processing system having subsystems connected by busses 公开/授权日:1996-12-10
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