发明授权
- 专利标题: Sensor element and particle sensor
- 专利标题(中): 传感器元件和粒子传感器
-
申请号: US833115申请日: 1997-04-04
-
公开(公告)号: US5825119A公开(公告)日: 1998-10-20
- 发明人: Kazuyoshi Shibata , Yukihisa Takeuchi , Eric J. Shrader , Joseph S. Eckerle , Ronald E. Pelrine
- 申请人: Kazuyoshi Shibata , Yukihisa Takeuchi , Eric J. Shrader , Joseph S. Eckerle , Ronald E. Pelrine
- 申请人地址: JPX
- 专利权人: NGK Insulators, Ltd.
- 当前专利权人: NGK Insulators, Ltd.
- 当前专利权人地址: JPX
- 主分类号: G01V9/00
- IPC分类号: G01V9/00 ; B06B1/06 ; G01N15/02 ; G01N15/06 ; G01N29/04 ; H01L41/08 ; H02N2/00
摘要:
A sensor element for detecting solid particles in a fluid includes: a detecting unit including a piezoelectric film consisting essentially of a ceramic material, a first electrode coated onto at least a portion of the outer surface of the piezoelectric film, and a second electrode coated onto at least a portion of the inner surface of the piezoelectric film; a vibrating portion consisting essentially of a second ceramic material, the detecting unit being placed on the vibrating portion so that the second electrode is coated onto at least a portion of the vibrating portion; and a fixing portion for fixing the vibrating portion so that the vibrating portion may vibrate. At least one of the detecting unit and the vibrating portion contacts with a solid particle in the fluid so that the piezoelectric film converts the vibration into an electric signal. A particle sensor includes the sensor element. The sensor element and the particle sensor are excellent in particle detection precision and durability at low cost.
公开/授权文献
- US5190329A Hand actuated load lifting device 公开/授权日:1993-03-02