发明授权
US5831694A TFT panel for high resolution- and large size- liquid crystal display
失效
TFT面板用于高分辨率和大尺寸液晶显示器
- 专利标题: TFT panel for high resolution- and large size- liquid crystal display
- 专利标题(中): TFT面板用于高分辨率和大尺寸液晶显示器
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申请号: US663523申请日: 1996-06-13
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公开(公告)号: US5831694A公开(公告)日: 1998-11-03
- 发明人: Kenichi Onisawa , Toshiki Kaneko , Kenichi Hashimoto , Tetsuroh Minemura
- 申请人: Kenichi Onisawa , Toshiki Kaneko , Kenichi Hashimoto , Tetsuroh Minemura
- 申请人地址: JPX Tokyo
- 专利权人: Hitachi, Ltd.
- 当前专利权人: Hitachi, Ltd.
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX7-147852 19950614; JPX7-173536 19950710
- 主分类号: G02F1/1362
- IPC分类号: G02F1/1362 ; H01L21/28 ; H01L21/336 ; H01L29/45 ; H01L29/49 ; G02F1/136 ; G02F1/1343
摘要:
A liquid crystal display unit in which at least one of a gate electrode line, a drain electrode line, and a gate electrode and a source/drain electrode of a TFT formed on a substrate is composed of a metal Nb or an alloy material of Nb. Glass is used as the substrate, and the size thereof is preferably 300 mm or longer on one side and 1 mm or less in thickness. In order to provide a low wiring resistance to produce a high resolution and large size TFT panel, the resistivity of the metal Nb or the alloy material thereof is preferably 25 .mu..OMEGA.cm or less, and the film stress of Nb or the alloy material thereof on the glass substrate is 400 MPa or less.
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