发明授权
- 专利标题: Crystal holding apparatus
- 专利标题(中): 水晶保持装置
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申请号: US763889申请日: 1996-12-11
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公开(公告)号: US5843229A公开(公告)日: 1998-12-01
- 发明人: Masanori Kimura , Eiichi Iino , Hirotoshi Yamagishi , Kiyotaka Takano
- 申请人: Masanori Kimura , Eiichi Iino , Hirotoshi Yamagishi , Kiyotaka Takano
- 申请人地址: JPX Tokyo
- 专利权人: Shin-Etsu Handotai Co., Ltd.
- 当前专利权人: Shin-Etsu Handotai Co., Ltd.
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX7-351275 19951227
- 主分类号: C30B15/32
- IPC分类号: C30B15/32 ; C30B15/30 ; C30B29/06 ; H01L21/208 ; C30B35/00
摘要:
In a crystal holding apparatus, a stepped engagement portion of a single crystal formed below a seed crystal is held by holding portions of a pair of lifting jigs so as to be pulled up. A lock mechanism consisting of a hook lever and an engagement pin is provided in order to prevent the closed lifting jigs from opening. Further, a portion of each holding portion to be contacted with a crystal is provided with a swing claw which is swingable about a horizontal pin. Accordingly, it becomes possible to reliably hold the crystal, to prevent generation of a defect in the crystal structure, and to prevent a material melt from being contaminated.
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