发明授权
- 专利标题： Surface inspection tool
- 专利标题（中）： 表面检测工具
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申请号： US840355申请日： 1997-04-28
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公开(公告)号： US5847823A公开(公告)日： 1998-12-08
- 发明人: Wayne Isami Imaino , Anthony Juliana, Jr. , Milton Russell Latta , Charles H. Lee , Wai Cheung Leung , Hal J. Rosen , James Hammond Brannon
- 申请人： Wayne Isami Imaino , Anthony Juliana, Jr. , Milton Russell Latta , Charles H. Lee , Wai Cheung Leung , Hal J. Rosen , James Hammond Brannon
- 申请人地址： NY Armonk
- 专利权人： International Business Machines Corporation
- 当前专利权人： International Business Machines Corporation
- 当前专利权人地址： NY Armonk
- 主分类号： G01N21/93
- IPC分类号： G01N21/93 ; G01N21/95 ; G11B7/0037 ; G11B7/26 ; G02B5/00 ; G01N21/88
摘要：
A calibration disk for a laser based inspection tool (LIT) for inspecting planar surfaces is described. The calibration disk has a plurality of overlapping bumps forming a circular ring with a width of one bump. The circular ring of bumps forms a feature of a known width and position on a disk which can be used to adjust one or more LIT's to yield calibrated results.
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