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US5849108A Photovoltaic element with zno layer having increasing fluorine content in layer thickness direction 失效
具有层厚度方向上氟含量增加的zno层的光电元件

Photovoltaic element with zno layer having increasing fluorine content in layer thickness direction
摘要：
A photovoltaic element has a substrate with a conductive surface, a zinc oxide layer containing fluorine and a non-single-crystal semiconductor layer, where the fluorine content of the zinc oxide layer (i) varies across the thickness of the layer, (ii) is at a minimum at the interface with the substrate and (iii) increases toward the semiconductor layer.
摘要（中）：

光电元件具有导电表面的衬底，含氟的氧化锌层和非单晶半导体层，其中氧化锌层（i）的氟含量在层的厚度上变化，（ii） 在与衬底的界面处至少是最小的，并且（iii）朝着半导体层增加。

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