发明授权
- 专利标题: Apparatus for drawing single crystals by the czochralski method
- 专利标题(中): 通过切克劳斯基法绘制单晶的装置
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申请号: US759975申请日: 1996-12-03
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公开(公告)号: US5853479A公开(公告)日: 1998-12-29
- 发明人: Joachim Aufreiter , Dieter Bruss , Burkhard Altekruger
- 申请人: Joachim Aufreiter , Dieter Bruss , Burkhard Altekruger
- 申请人地址: DEX Hanau am Main
- 专利权人: Balzers und Leybold
- 当前专利权人: Balzers und Leybold
- 当前专利权人地址: DEX Hanau am Main
- 优先权: DEX19548845.8 19951227
- 主分类号: C30B15/26
- IPC分类号: C30B15/26 ; H01L21/208 ; C30B35/00
摘要:
An image of the meniscus ring (21) between the crystal (20) and the melt (4) is formed by optical means (12, 24) on a sensor, the signals of which yield the actual value for the diameter of the crystal. Two optical measuring devices are provided, the optical paths of which are defined by base points on the meniscus ring (21) and two planes which are offset by 90.degree. to each other and which are parallel to the main axis of the crystal and in tangential contact with the meniscus ring (21). The two optical paths are preferably set up to intersect, their intersection being in the viewing window.
公开/授权文献
- US5589052A Method for electrolyzing water 公开/授权日:1996-12-31
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