发明授权
US5853479A Apparatus for drawing single crystals by the czochralski method 失效
通过切克劳斯基法绘制单晶的装置

Apparatus for drawing single crystals by the czochralski method
摘要:
An image of the meniscus ring (21) between the crystal (20) and the melt (4) is formed by optical means (12, 24) on a sensor, the signals of which yield the actual value for the diameter of the crystal. Two optical measuring devices are provided, the optical paths of which are defined by base points on the meniscus ring (21) and two planes which are offset by 90.degree. to each other and which are parallel to the main axis of the crystal and in tangential contact with the meniscus ring (21). The two optical paths are preferably set up to intersect, their intersection being in the viewing window.
公开/授权文献
信息查询
0/0