发明授权
- 专利标题: Method of fabricating a CMOS transistor
- 专利标题(中): 制造CMOS晶体管的方法
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申请号: US701585申请日: 1996-08-22
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公开(公告)号: US5856215A公开(公告)日: 1999-01-05
- 发明人: Chae Hyun Jung
- 申请人: Chae Hyun Jung
- 申请人地址: KRX Kyungki-do
- 专利权人: Hyundai Electronics Industries Co., Ltd.
- 当前专利权人: Hyundai Electronics Industries Co., Ltd.
- 当前专利权人地址: KRX Kyungki-do
- 优先权: KRX95-26537 19950825
- 主分类号: H01L29/739
- IPC分类号: H01L29/739 ; H01L21/8238 ; H01L27/092
摘要:
The present invention relates to a method of fabricating a CMOS transistor which can further reduce the size of a chip since it is not necessary to consider the metal contact process margin since a gate electrode of a PMOS transistor and a gate electrode of an NMOS transistor are directly connected with a polysilicon wiring during a process of forming the gate electrodes, which can prevent the formation of a parasitic transistor by forming a cell space region in an active region below the polysilicon wiring.
公开/授权文献
- US5069352A Transportable cargo container 公开/授权日:1991-12-03
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