发明授权
- 专利标题： Processing apparatus and processing method
- 专利标题（中）： 处理装置及处理方法
-
申请号： US929106申请日： 1997-09-15
-
公开(公告)号： US5871584A公开(公告)日： 1999-02-16
- 发明人: Kiyohisa Tateyama , Masafumi Nomura , Takayuki Tomoeda
- 申请人： Kiyohisa Tateyama , Masafumi Nomura , Takayuki Tomoeda
- 申请人地址： JPX Tokyo JPX Tosu
- 专利权人： Tokyo Electron Limited,Tokyo Electron Kyushu Limited
- 当前专利权人： Tokyo Electron Limited,Tokyo Electron Kyushu Limited
- 当前专利权人地址： JPX Tokyo JPX Tosu
- 优先权： JPX6-200289 19940803
- 主分类号： G03F7/30
- IPC分类号： G03F7/30 ; B05C5/02 ; B05C11/08 ; B05C11/10 ; H01L21/02 ; H01L21/027 ; B05B3/00 ; B08B3/00
摘要：
A develop processing apparatus is provided for processing an object with a developing solution, comprising a retaining member for rotatably retaining the object, a developing solution supply nozzle for supplying the developing solution to the object, a developing solution sucking nozzle for sucking the developing solution supplied to the object, a developing solution supply nozzle moving mechanism for moving the developing solution supply nozzle above the object, a developing solution sucking nozzle moving mechanism for moving the developing solution sucking nozzle above the object. After the developing solution is supplied to the object subsequent to moving the developing solution supply nozzle, the developing solution sucking nozzle is moved and the developing solution on the object is sucked.
公开/授权文献
信息查询
IPC分类:
