发明授权
- 专利标题: Non-volatile semiconductor memory device
- 专利标题(中): 非易失性半导体存储器件
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申请号: US596820申请日: 1996-02-05
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公开(公告)号: US5877524A公开(公告)日: 1999-03-02
- 发明人: Takahiro Oonakado , Hiroshi Onoda , Natsuo Ajika , Kiyohiko Sakakibara
- 申请人: Takahiro Oonakado , Hiroshi Onoda , Natsuo Ajika , Kiyohiko Sakakibara
- 申请人地址: JPX Tokyo
- 专利权人: Mitsubishi Denki Kabushiki Kaisha
- 当前专利权人: Mitsubishi Denki Kabushiki Kaisha
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX7-148969 19950615
- 主分类号: H01L21/8247
- IPC分类号: H01L21/8247 ; H01L29/788 ; H01L29/792
摘要:
In a non-volatile semiconductor memory device according to the present invention, a p type source region and a p type drain region are formed in the surface of an n well. A floating gate electrode and a control gate electrode are formed on a channel region with a tunnel oxide film interposed therebetween. According to this structure, a negative potential is applied to the drain region and a positive potential is applied to the control gate electrode when data is programmed, whereby electrons are injected from the drain region to the floating gate electrode by a band-to-band tunnel current induced hot electron injection current in the drain region. As a result, a non-volatile semiconductor memory device is provided which can prevent deterioration of the tunnel oxide film and which can be miniaturized.
公开/授权文献
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