发明授权
- 专利标题: Jig for heat treatment and process for fabricating the jig
- 专利标题(中): 用于热处理的夹具和用于制造夹具的工艺
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申请号: US770239申请日: 1996-12-20
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公开(公告)号: US5882807A公开(公告)日: 1999-03-16
- 发明人: Yoshio Funato , Koji Furukawa , Hisao Yamamoto , Nobuo Kageyama
- 申请人: Yoshio Funato , Koji Furukawa , Hisao Yamamoto , Nobuo Kageyama
- 申请人地址: JPX Tokyo JPX Tokyo
- 专利权人: Asahi Glass Company, Ltd,Tokai Carbon Company, Ltd.
- 当前专利权人: Asahi Glass Company, Ltd,Tokai Carbon Company, Ltd.
- 当前专利权人地址: JPX Tokyo JPX Tokyo
- 优先权: JPX7-352098 19951226
- 主分类号: C04B41/52
- IPC分类号: C04B41/52 ; C04B41/89 ; C23C16/32 ; H01L21/00 ; C04B35/56
摘要:
A jig used for heat treatment made from an SiC-coated silicon carbide material, wherein the SiC film is coated by the CVD method on a silicon carbide matrix in which silicon has been impregnated and wherein there are no pores with a diameter of 2 .mu.m or larger in the outer layer of the matrix within 200 .mu.m from the interface of the SiC film and the silicon carbide matrix when observed by a scanning electron microscope at a magnification of 400 times. The jig is manufactured by producing an SiC film on the surface of a silicon carbide matrix in which silicon has been impregnated by introducing a raw material compound for producing the SiC film and forming the SiC film at a temperature from 1000.degree. C. to 1290.degree. C. under a pressure from 500 to 760 Torr in a non-oxidative atmosphere. The jig exhibits superior resistance to high temperature heating cycles and excellent high thermal shock resistance required for heat treatment in semiconductor manufacturing.
公开/授权文献
- US5195596A Firehose carrying case 公开/授权日:1993-03-23
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