发明授权
- 专利标题: Astigmatism measurement apparatus and method based on a focal plane separation measurement
- 专利标题(中): 基于焦平面分离测量的散光测量装置和方法
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申请号: US816837申请日: 1997-03-13
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公开(公告)号: US5883982A公开(公告)日: 1999-03-16
- 发明人: James K. Riley , Keith L. Frost , William C. Lindow , Kim J. Hansen , Tuan Phan , James A. Stephanick
- 申请人: James K. Riley , Keith L. Frost , William C. Lindow , Kim J. Hansen , Tuan Phan , James A. Stephanick
- 申请人地址: WA Redmond
- 专利权人: NeoPath, Inc.
- 当前专利权人: NeoPath, Inc.
- 当前专利权人地址: WA Redmond
- 主分类号: G01B11/00
- IPC分类号: G01B11/00 ; G01M11/02 ; G06T1/00 ; G06K9/36
摘要:
A computer receives image data from a star-shaped optical target in the object plane and calculates angle-dependent boundary sharpness. The horizontal, x-direction, amplitude derivative and the vertical, y-direction, amplitude derivative are computed over a portion of each star pattern image from a Z panning sequence. A microscope slide stage, carrying the target, is moved vertically from a level just below where the target is in focus to a level just above where the target is in focus. For each small increment of vertical motion, Z panning, an image of the star pattern is captured for analysis. Computations are performed on the differentiated images to search for evidence of elongation of the point spread function and variation with stage Z position of the angle of long axis of such an out-of-round point spread function. The presence of a distorted point spread function that varies along the optical axis indicates astigmatism.
公开/授权文献
- US4656948A Water containing explosive cartridge and preparation thereof 公开/授权日:1987-04-14
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