发明授权
US5885345A Method of fabricating shaped crystals by overhead-pressure liquid
injection
失效
通过塔顶压力液体注射制造成形晶体的方法
- 专利标题: Method of fabricating shaped crystals by overhead-pressure liquid injection
- 专利标题(中): 通过塔顶压力液体注射制造成形晶体的方法
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申请号: US817873申请日: 1997-05-21
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公开(公告)号: US5885345A公开(公告)日: 1999-03-23
- 发明人: Shiro Sakuragi
- 申请人: Shiro Sakuragi
- 申请人地址: JPX Ibaraki
- 专利权人: Union Material Inc.
- 当前专利权人: Union Material Inc.
- 当前专利权人地址: JPX Ibaraki
- 优先权: JPX7-276751 19950929; JPX7-351521 19951226
- 主分类号: C30B11/00
- IPC分类号: C30B11/00 ; F25B21/02 ; F25D11/00 ; H01L35/32 ; H01L35/34 ; C30B15/34
摘要:
A shaper (2) is arranged within a shaping vessel (1). A raw material for a crystal is inserted into the shaping vessel (1) and a crystal melt (5) is formed by setting it in a predetermined atmosphere and heating it. A mechanical force F1 is applied to the crystal melt (5), which is present on the upper surface of the shaper (2), by a pressuring member (4) from above. The crystal melt (5) has nowhere to escape but a gap (3) formed by the shaper(2), so it is injected into that gap (3) as shown by the arrow. This method of fabricating a shaped crystal is suitable for fabricating a monocrystal or multicrystal semiconductor from a material such as silicon, germanium, or bismuth telluride.
公开/授权文献
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