发明授权
- 专利标题： Method and apparatus for predicting failure of an eletrostatic chuck
- 专利标题（中）： 用于预测静电吸盘故障的方法和装置
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申请号： US42972申请日： 1998-03-17
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公开(公告)号： US5886865A公开(公告)日： 1999-03-23
- 发明人: Vijay D. Parkhe , Steven Sansoni , Vincent E. Burkhart
- 申请人： Vijay D. Parkhe , Steven Sansoni , Vincent E. Burkhart
- 申请人地址： CA Santa Clara
- 专利权人： Applied Materials, Inc.
- 当前专利权人： Applied Materials, Inc.
- 当前专利权人地址： CA Santa Clara
- 主分类号： H01L21/00
- IPC分类号： H01L21/00 ; H01L21/683 ; H02N13/00
摘要：
A method and apparatus for determining the state of contamination of an electrostatic chuck. The method consists of applying a voltage to at least one of the chuck electrodes and measuring a leakage current to any of the chuck electrodes. The measured current is compared to a first threshold value. If the measured current is greater than the first threshold value, the chuck is deemed contaminated.
公开/授权文献
- US4761291A Pineapple processing method 公开/授权日：1988-08-02
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