发明授权
US5891234A Spin on glass material and method for forming a semiconductor device by
using improved spin on glass material
失效
通过使用玻璃材料上的旋转来旋转玻璃材料和形成半导体器件的方法
- 专利标题： Spin on glass material and method for forming a semiconductor device by using improved spin on glass material
- 专利标题（中）： 通过使用玻璃材料上的旋转来旋转玻璃材料和形成半导体器件的方法
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申请号： US619086申请日： 1996-03-21
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公开(公告)号： US5891234A公开(公告)日： 1999-04-06
- 发明人: Kenichi Koyanagi , Koji Kishimoto , Tetsuya Homma
- 申请人： Kenichi Koyanagi , Koji Kishimoto , Tetsuya Homma
- 申请人地址： JPX Tokyo
- 专利权人： NEC Corporation
- 当前专利权人： NEC Corporation
- 当前专利权人地址： JPX Tokyo
- 优先权： JPX7-087650 19950322
- 主分类号： H01L21/768
- IPC分类号： H01L21/768 ; C03C1/00 ; H01L21/316 ; C09D183/04
摘要：
A spin on glass composition which includes in a solvent as a main component alkoxysilane represented by H.sub.n Si(OR).sub.4-n, where n is 1, 2, or 3 and R is an alkyl group. Water or alcohol is available as a solvent. It is preferable to add the above alkoxysilane with at least any one of a phosphorus compound, boron compound and a germanium compound. It is also preferable to add the above alkoxysilane not only with tetraalkoxysilane Si(OR).sub.4, where R is an alkyl group, but also with at least any one of phosphorus compound, boron compound and germanium compound.
公开/授权文献
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