发明授权
US5893722A Fabrication of vertical cavity surface emitting laser with current
confinement
失效
具有电流限制的垂直腔表面发射激光器的制造
- 专利标题: Fabrication of vertical cavity surface emitting laser with current confinement
- 专利标题(中): 具有电流限制的垂直腔表面发射激光器的制造
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申请号: US843116申请日: 1997-04-28
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公开(公告)号: US5893722A公开(公告)日: 1999-04-13
- 发明人: Mary K. Hibbs-Brenner , James R. Biard
- 申请人: Mary K. Hibbs-Brenner , James R. Biard
- 申请人地址: MN Minneapolis
- 专利权人: Honeywell Inc.
- 当前专利权人: Honeywell Inc.
- 当前专利权人地址: MN Minneapolis
- 主分类号: H01S5/042
- IPC分类号: H01S5/042 ; H01S5/183 ; H01S5/20 ; H01S5/343 ; H01L21/20
摘要:
A vertical cavity surface emitting laser having a planar structure, having an implantation or diffusion at the top of the mirror closest to the substrate or at the bottom of the mirror farthest from the substrate, to provide current confinement with the gain region, and having an active region and another mirror formed subsequent to the implantation or diffusion. This structure has an implantation or diffusion that does not damage or detrimentally affect the gain region, and does provide dimensions of current confinement that are accurately ascertained. Alternatively, the implantation or diffusion for current confinement may be placed within the top mirror, and several layers above the active region, still with minimal damage to the gain region and having a well-ascertained current confinement dimension.
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