Invention Grant
US5894090A Silicon bulk micromachined, symmetric, degenerate vibratorygyroscope,
accelerometer and sensor and method for using the same
失效
硅体微加工,对称,退化振动陀螺仪,加速度计和传感器及其使用方法
- Patent Title: Silicon bulk micromachined, symmetric, degenerate vibratorygyroscope, accelerometer and sensor and method for using the same
- Patent Title (中): 硅体微加工,对称,退化振动陀螺仪,加速度计和传感器及其使用方法
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Application No.: US657685Application Date: 1996-05-31
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Publication No.: US5894090APublication Date: 1999-04-13
- Inventor: Tony K. Tang , William J. Kaiser , Randall K. Bartman , Jaroslava Z. Wilcox , Roman C. Gutierrez , Robert J. Calvet
- Applicant: Tony K. Tang , William J. Kaiser , Randall K. Bartman , Jaroslava Z. Wilcox , Roman C. Gutierrez , Robert J. Calvet
- Applicant Address: CA Pasadena
- Assignee: California Institute of Technology
- Current Assignee: California Institute of Technology
- Current Assignee Address: CA Pasadena
- Main IPC: G01C19/5719
- IPC: G01C19/5719 ; G01P15/125 ; G01P15/14 ; G01P15/18 ; G01C19/00 ; G01P9/00
Abstract:
When embodied in a microgyroscope, the invention is comprised of a silicon, four-leaf clover structure with a post attached to the center. The whole structure is suspended by four silicon cantilevers or springs. The device is electrostatically actuated and capacitively detects Coriolis induced motions of the leaves of the leaf clover structure. In the case where the post is not symmetric with the plane of the clover leaves, the device can is usable as an accelerometer. If the post is provided in the shape of a dumb bell or an asymmetric post, the center of gravity is moved out of the plane of clover leaf structure and a hybrid device is provided. When the clover leaf structure is used without a center mass, it performs as a high Q resonator usable as a sensor of any physical phenomena which can be coupled to the resonant performance.
Public/Granted literature
- US4644911A Cylinder block for internal combustion engine Public/Granted day:1987-02-24
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