发明授权
- 专利标题： Support boat for objects to be processed
- 专利标题（中）： 支持船舶处理对象
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申请号： US654413申请日： 1996-05-28
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公开(公告)号： US5897311A公开(公告)日： 1999-04-27
- 发明人: Katsuo Nishi
- 申请人： Katsuo Nishi
- 申请人地址： JPX Tokyo-To
- 专利权人： Tokyo Electron Limited
- 当前专利权人： Tokyo Electron Limited
- 当前专利权人地址： JPX Tokyo-To
- 优先权： JPX7-156751 19950531
- 主分类号： C23C16/458
- IPC分类号： C23C16/458 ; C30B25/12 ; C30B31/14 ; H01L21/22 ; H01L21/31 ; H01L21/324 ; H01L21/673 ; F27D3/12
摘要：
A support boat for objects-to-be-processed including a plurality of support shelves formed in multi-stages spaced from each other by a vertical pitch for mounting a plurality of objects-to-be-processed which are to be heat treated in a vertical heat treatment apparatus; and a plurality of support bars for interconnecting the support shelves vertically spaced from each other and holding the same, the support boat comprising a light shielding plate disposed above an uppermost one or below a lowermost one of the support shelves for blocking heat rays from a heater for heating, whereby abrupt heating of central parts of those of the objects-to-be-processed which are positioned near the top or the bottom of the support boat is suppressed, and all the objects-to-be-processed can have substantially the same heat history.
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