发明授权
- 专利标题： Array of optical integrated devices with micro-lenses
- 专利标题（中）： 具有微透镜的光学集成器件阵列
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申请号： US582162申请日： 1996-01-02
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公开(公告)号： US5898191A公开(公告)日： 1999-04-27
- 发明人: Young-Se Kwon , O-Seung Yang
- 申请人： Young-Se Kwon , O-Seung Yang
- 申请人地址： KRX Taejon
- 专利权人： Korea Advanced Institute of Science and Technology
- 当前专利权人： Korea Advanced Institute of Science and Technology
- 当前专利权人地址： KRX Taejon
- 优先权： KRX95-1321 19950125
- 主分类号： B41J2/447
- IPC分类号： B41J2/447 ; H01L31/0232 ; H01L33/20 ; H01L33/00
摘要：
An optical integrated device having an even height such that it can be easily arrayed or integrated with other devices in a single substrate. The device includes a semi-conductor substrate having a substrate-side electrode which is formed on one side of the semi-conductor substrate. A micro-lens layer is epitaxially grown on the opposite side to where the substrate-side electrode is formed. The opposite side also has a hemispherically etched surface. The device also includes epitaxial layers which are grown on a whole area on the micro lens layer and a dielectric film which is formed on the epitaxial layers. Additionally, an epilayer-side electrode is formed on a whole area of the dielectric film.
公开/授权文献
- US4488436A Pressure sensor 公开/授权日：1984-12-18